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The FeCoBSi thin films were deposited on the flexible mylar substrates by DC magnetron sputtering. The as-deposited films showed as an amorphous structure. Permeability characteristics in the range of 0.5-18 GHz were investigated. The values of permeability increased with an increasing thickness of the films when the thickness was less than 1 µm. This unusual result may be due to the various microstructures, stress or defects of the films. When the thickness was more than 1 µm, the values ofdoi:10.2529/piers090902032622 fatcat:wn2ce7uxjrfhdjydsaont2tuzm