Micromachined atomic force microprobe with integrated capacitive read-out

J Brugger, R A Buser, N F de Rooij
1992 Journal of Micromechanics and Microengineering  
We developed a micromachining process for the fabrication of highly sensitive capacitor probes to be used for displacement measurement of an atomic force cantilever. The capacitive structure consists of two adjacent single-crystal silicon beams, one carrying a sharp tip for the force interaction, the other being the counter-electrode. The air gap of 1.5 pm separating the two electrodes is obtained by removal of the oxide in between by selective etching. The capacitance has a typical value of
more » ... typical value of -0.2 pF. Forces acting on the tip induce a bending of the cantilever and change the caDacitance which can be detected bv electronic circuits.
doi:10.1088/0960-1317/2/3/026 fatcat:ciyqq32qf5bv5cu6z7aimfnmgq