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Ice lithography for 3D nanofabrication
2019
Science Bulletin
Nanotechnology and nanoscience are enabled by nanofabrication. Electron-beam lithography, which makes 2D patterns down to a few nanometers, is one of the fundamental pillars of nanofabrication. Recently, significant progress in 3D electron-beam-based nanofabrication has been made, such as the emerging ice lithography technology, in which ice thin-films are patterned by a focused electron-beam. Here, we review the history and progress of ice lithography, and focus on its applications in
doi:10.1016/j.scib.2019.06.001
pmid:36659676
fatcat:yqmgptgt2bc65bb5aoeev2c3w4