Carbon nanotube, with its unique electrical performance, quasi-one-dimensional size and stable structure, holds great promise to be the most ideal semiconductor material in post Moore era. Significant process has been made in carbon based electronics. High semiconductor purity (better than 99.9999%) and high density (100-200 CNTs/ μm ) arrays of CNTs can be obtained on 4-inch wafer. The gate length of CNFET can be scaled down to 5 nm with superior performance than Si-FET. And the world's first

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... arbon based modern microprocessor, RV16X-NANO, has come out. This paper reviews the development of carbon nanotube in materials, devices and integrated circuits, as well as its potential applications in some fields like optoelectronics, sensor, display and radio frequency. Furthermore, this paper lists a series of challenges faced by carbon based CMOS integrated circuits to realize continuous development and industrialization, and makes a further prospect for the development of carbon based technology.