Testing of optical materials for 193-nm applications

Vladimir Liberman, Mordechai Rothschild, Jan H. C. Sedlacek, Ray S. Uttaro, Andrew Grenville, Allen K. Bates, Chris K. Van Peski, Philip T. C. Chen, William E. McClintock, Gary J. Rottman
1998 Optical Systems Contamination and Degradation  
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doi:10.1117/12.328512 fatcat:nd65attg7zdmtovfpy37dtz2ki