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Packaging Technologies of Optical Circuits. Silicon Micromachined Micro-Optical Bench
光回路実装技術 光回路実装技術の新展開 シリコンマイクロマシニングによる微小光学実装基板
1995
The Journal of Japan Institute for Interconnecting and Packaging Electronic Circuits
光回路実装技術 光回路実装技術の新展開 シリコンマイクロマシニングによる微小光学実装基板
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