Win X-ray, The Monte Carlo Program for X-ray Microanalysis in the Scanning Electron Microscope

Raynald Gauvin, Eric Lifshin, Hendrix Demers, Paula Horny, Helen Campbell
2003 Microscopy and Microanalysis  
The computation of characteristic lines as well as the bremstrahlung allows to improve the accuracy of x-ray microanalysis in the scanning electron microscope (SEM) using an energy dispersive spectrometer (EDS). This entitles not only to model background's shape for the extraction of net X-ray intensity, but also to predict peak to background ratios and delectability limits of an element in a given system. Also, the magnitude of fluorescence correction from the absorption of characteristic
more » ... characteristic lines and the bremstrallung can be computed from simulated X-ray spectra. Finally, new ways to perform quantitative analysis could be developed since the total background intensity is function of specimen's composition. In this paper, a new Monte Carlo program that computes the full X-ray spectrum, measured with an EDS detector in a SEM is described. This program, named Win X-ray, is based on the simulation of electron scattering in solids using the Monte Carlo method. This technique is described by Hovington et al. 1 for X-ray microanalysis in the SEM. The complete details of this program are given in the paper of Gauvin et al. 2 . Win X-ray have been designed to simulate the full X-ray spectra (the characteristic lines and the bremstrahlung) for homogeneous alloys or compounds for any angles of the incident electron beam and the X-ray detector axis relative to the specimen normal. Also, this program computes absolute X-ray intensities in order to simulate real experimental conditions for incident electron energies ranging from 1 to 40 keV. This program also computes the complete X-ray spectrum of a non conductive material using the model described by Hendrix et al. 3 .The Monte Carlo program Win X-ray can be downloaded for free at Figure [1] shows the window interface of Win X-ray.
doi:10.1017/s1431927603440634 fatcat:67ehmwu5ijdhzcznznjichtpf4