Optimum pre-load of surface acoustic wave motor

M. Kurosawa, M. Takahashi, T. Higuchi
1996 IEEE Ultrasonics Symposium. Proceedings  
We have examined optimum pressing force, namely, pre-load for a slider to obtain superior operation condition of a surface acoustic wave motor. We used steel balls for sliders. With a permanent magnet the pre-load was controlled. The steel balls that we used were 0.5, 1 and 2 mm diameter to change contact conditions such as contact pressure, contact area and deformation of a stator and the slider. The stator transducer was lithium niobate 128 degrees Y-rotated X-propagation substrate. The
more » ... ubstrate. The driving frequency of the Rayleigh wave was about 10 MHz. As a result, the deformation of the stator and the slider by the pre-load should be half of the particle vibration amplitude. This condition was independent to the ball diameter and particle vibration amplitude. It was achieved that the output thrust force per square mm was 50 N and the maximum speed was 0.8 m/sec. The surface acoustic wave motor must have high potential to be a large output force, high speed, quick response, long traveling distance and low in profile micro linear actuator.
doi:10.1109/ultsym.1996.583994 fatcat:aeq7u677brdz3btklah2rmv6hi