Top-Orthogonal-to-Bottom-Electrode Capacitive Micromachined Ultrasound Transducers for Low-Cost 3D Ultrasound Imaging

Alexander P Sampaleanu
2013
Capacitive micromachined ultrasound transducers (CMUTs) offer a promising solution for three-dimensional ultrasound imaging due to their ability to be easily fabricated in two-dimensional arrays. However, channel routing is still non-trivial and cost-intensive. The subject of this thesis is a "Top-Orthogonal-to-Bottom-Electrode" (TOBE) 2-D CMUT array architecture, along with its respective rowcolumn addressing schemes, which can significantly reduce the channel count of a 2-D array, such that
more » ... array, such that only 2N channels are required for an N x N array. Background on acoustics, ultrasound imaging, and CMUT technology is presented before the novel array architecture and imaging schemes is described. Arrays were fabricated using a sacrificial release method, and acoustic immersion and air-coupled tests, along with imaging simulations, were done to validate array functionality. Results showed that single-element actuation is possible with a rowcolumn addressing scheme, allowing for novel imaging schemes which could result in significantly more cost-effective 3-D ultrasound imaging.
doi:10.7939/r30r9mf5j fatcat:udu2ugd5rbdu7g7k56553ahw5a