Dependence of De-molding Force on Process Conditions in UV Nanoimprint

Tomoki Nishino, Ryosuke Suzuki, Hiroaki Kawata, Yoshiaki Hirai
2011 Journal of Photopolymer Science and Technology (Fotoporima Konwakai shi)  
doi:10.2494/photopolymer.24.101 fatcat:ycits67iavhjrfcy4spke5xnua