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A programmable dark-field detector for imaging two-dimensional materials in the scanning electron microscope
2019
Emerging Digital Micromirror Device Based Systems and Applications XI
Unit cell orientation information is encoded in electron diffraction patterns of crystalline materials. Traditional transmission electron detectors implemented in the scanning electron microscope are highly symmetric and are insensitive to in-plane unit cell orientation information. Herein we detail the implementation of a transmission electron detector that utilizes a digital micromirror array to select anisotropic portions of a diffraction pattern for imaging purposes. We demonstrate that
doi:10.1117/12.2508694
fatcat:rqseg3r5n5fw5a2jdtwepnahie