AJC-11856 SnO2:Sb thin films were prepared by the spray pyrolysis technique on optical micro slide glass at substrate temperature 793 (± 5) K. The relationship between the antimony doping level and the electrical, structural and optical properties of the films were investigated. The X-ray diffraction patterns showed that the films are polycrystalline. The grain size varies from 28.19 to 33.59 nm. Atomic force microscopic study revealed the surface of SnO2:Sb to be made of nanocrystalline

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... es. The electrical study has revealed that the films are degenerate and exhibit n-type electrical conductivity. The SnO2:Sb films had a minimum resistivity of 0.28 × 10 -4 Ω cm, maximum carrier density of 37.6 × 10 19 cm -3 and mobility of 590 cm 2 /V.s. The sprayed SnO2:Sb film having minimum sheet resistance of 0.17 Ω/cm 2 , highest figure of merit of 135 × 10 -4 Ω -1 at 550 nm. The sheet resistance attained for the doped film in this study has been lower than the values reported for 2 wt % antimony doped tin oxide films prepared from aqueous solution of SnCl2•2H2O precursor. The obtained results revealed that the structures and properties of the films were greatly affected by doping levels.