Characterization techniques for surface-micromachined devices

William P. Eaton, Norman F. Smith, Lloyd W. Irwin, Danelle M. Tanner, Patrick J. French, Kevin H. Chau
1998 Micromachined Devices and Components IV  
Using a microengine as the primary test vehicle, we have examined several aspects of characterization. Parametric measurements provide fabrication process information. Drive signal optimization is necessary for increased microengine performance. Finally, electrical characterization of resonant frequency and quality factor can be more accurate than visual techniques.
doi:10.1117/12.323919 fatcat:m24t5xa355bdxlxjhov6k7p6ee