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Third International Symposium on Laser Precision Microfabrication
During the past few years research groups demonstrated the potential of femtosecond pulses for ultra-precise machining. Initial investigations of industrial applications soon showed, however, several unexpected quality problems such as formation of recast, ripples and irregular hole shapes even in the femtosecond pulse regime. This contribution will present some progress in fundamental understanding of the ultrafast ablation process. On the basis of this knowledge technical means have beendoi:10.1117/12.486506 fatcat:65xm7fhrdvbafcbgnjlwh4dbka