Femtosecond technology for precision manufacturing: fundamental and technical aspects

Friedrich Dausinger, Isamu Miyamoto, Kojiro F. Kobayashi, Koji Sugioka, Reinhart Poprawe, Henry Helvajian
2003 Third International Symposium on Laser Precision Microfabrication  
During the past few years research groups demonstrated the potential of femtosecond pulses for ultra-precise machining. Initial investigations of industrial applications soon showed, however, several unexpected quality problems such as formation of recast, ripples and irregular hole shapes even in the femtosecond pulse regime. This contribution will present some progress in fundamental understanding of the ultrafast ablation process. On the basis of this knowledge technical means have been
more » ... eans have been developed allowing to achieve an unprecedented level of accuracy at acceptable expenses. A comparison between pico-and femtosecond regime will be presented.
doi:10.1117/12.486506 fatcat:65xm7fhrdvbafcbgnjlwh4dbka