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Front Matter: Volume 9206
2014
Advances in Metrology for X-Ray and EUV Optics V
Preserved Fulltext
Proc. of SPIE Vol. 9206 920601-2 Downloaded From: https://www.spiedigitallibrary.org/conference-proceedings-of-spie on 7/22/2018 Terms of Use: https://www.spiedigitallibrary.org/terms-of-use iii Proc. of SPIE Vol. 9206 920601-3 Downloaded From: https://www.spiedigitallibrary.org/conference-proceedings-of-spie on 7/22/2018 Terms of Use: https://www.spiedigitallibrary.org/terms-of-use SESSION 5 FACILITIES 0I A new x-ray optics laboratory (XROL) at the ALS: mission, arrangement, metrology
doi:10.1117/12.2084726
fatcat:6c2sljgat5fdpk47mnrizvnugy