A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2017; you can also visit the original URL.
The file type is application/pdf.
A. Gallagher, S. Barzen, M. Childs, A. Laracuente. "Atomic-scale characterization of hydrogenated amorphous-silicon films and devices. Annual subcontract report, 15 April 1994--14 March 1998." (1998)