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An ultra fast-acting electro-hydraulic digital valve and high-speed electro-hydraulic servo valves using multilayered PZT elements
1993
Proceedings of the JFPS International symposium on fluid power
This paper deals with the development of two-type ultra high speed valves, one of them is a highspeed digital valve whose switching speed is within 100 microseconds, and the other is an ultrahigh-speed servo valve with the spool displacement of 30um and the bandwidth over 5kHz. In this study, commercially available multilayered piezo-devices are used to drive the coupled poppets of the digital valve and the spool of the servo valve directly. In the former one, by introducing a kind of feed
doi:10.5739/isfp.1993.121
fatcat:m3v7zgnnczg57og37cctdxc464