An ultra fast-acting electro-hydraulic digital valve and high-speed electro-hydraulic servo valves using multilayered PZT elements

Shinichi YOKOTA, Kenichirou HIRAMOTO, Kotarou AKUTSU
1993 Proceedings of the JFPS International symposium on fluid power  
This paper deals with the development of two-type ultra high speed valves, one of them is a highspeed digital valve whose switching speed is within 100 microseconds, and the other is an ultrahigh-speed servo valve with the spool displacement of 30um and the bandwidth over 5kHz. In this study, commercially available multilayered piezo-devices are used to drive the coupled poppets of the digital valve and the spool of the servo valve directly. In the former one, by introducing a kind of feed
more » ... rd control and employing some new methods, on-off-type coupled poppet valves with high-speed response to within 100 microseconds of switching speed are successfully developed. In the latter one, the hysteresis of the driving element of the valve is removed by introducing an inverse hysteresis element implemented on a microcomputers and operated in real time. As a result, a servo valve with the bandwidth over 5kHz is developed.
doi:10.5739/isfp.1993.121 fatcat:m3v7zgnnczg57og37cctdxc464