In the magnetic levitation planar motor which can achieve six degrees-of-freedom motion, decoupling control is realised by coil array commutation algorithm, due to the limitation of the sampling period of the real-time system, a high-dynamic coil array commutation algorithm is needed to achieve higher computational efficiency, but this will lead to the coil array not accurately providing the force/torque required for the trajectory movement, and generate a certain torque ripple error. In this

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... udy, the cause of this torque ripple error is analysed, and a feedforward compensation method is proposed. The results of simulation and experiment show that the proposed feedforward compensation method of high-dynamic coil array commutation algorithm can reduce torque ripple error by 88%, and achieve higher trajectory tracking accuracy while satisfying high computational efficiency.