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Encapsulated thermopile detector array for IR microspectrometer
2010
Next-Generation Spectroscopic Technologies III
The miniaturized IR spectrometer discussed in this paper is comprised of: slit, planar imaging diffraction grating and Thermo-Electric (TE) detector array, which is fabricated using CMOS compatible MEMS technology. The resolving power is maximized by spacing the TE elements at an as narrow as possible pitch, which is limited by processing constraints. The large aspect ratio of the TE elements implies a large cross-sectional area between adjacent elements within the array and results in a
doi:10.1117/12.849994
fatcat:zjs4jdrtn5bjxojgvf2vhu7pje