OD5 新H形LiTaO_3圧電ジャイロの漏れ出力抑圧効果と電気機械結合係数の関係(バルク波デバイス)
OD5 The leakage suppression and the electromechanical coupling coefficient of the new H-type LiTaO_3 piezoelectric gyroscope

Noboru Wakatsuki, Hiroshi Tanaka
Proceedings of Symposium on Ultrasonic Electronics  
doi:10.24492/iuse.18.0_25 fatcat:4d5qusr4prdpxhbgkgeuxkcnci