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The zeta (ζ) factor proposed by Watanabe and Williams [M. Watanabe and D. B. Williams, J. Microsc. 221, 89 (2006)] is a fundamental parameter for quantitative X-ray analysis with consideration of X-ray absorption using scanning transmission electron microscopy in combination with silicon drift detectors (STEM-SDD). In this study, the ζ-factors for Fe and Mn in ironbased alloy systems were determined by two thin-film approaches, namely, the "lift-off method" and the "direct deposition method".doi:10.1380/ejssnt.2020.94 fatcat:nlsbxqjxhfcwxddqvip5qgcolm