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Compositionally modulated Pb(Mg/sub 1/3/Nb/sub 2/3/)O/sub 3/-PbTiO/sub 3/ relaxor thin films deposited by pulsed excimer laser ablation technique
Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics, 2002. ISAF 2002.
Thin films of (l-x)Pb(MglnNb2,3)03 -xPbTi03 (x = 0.1 to 0.3) (PMN-PT) were deposited on the platinum coated silicon substrate by pulsed excimer laser ablation technique. A template layer of LaSro,sCoo,~03 (LSCO) was deposited on platinum substrate prior to the deposition of PMN-PT thin films. The composition and the structure of the films were modulated via proper variation of the deposition parameter such as substrate temperature, laser fluence and thickness of the template layers. We observeddoi:10.1109/isaf.2002.1195900 fatcat:d33jaoatk5hpnayu6ad74zqhbe