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J2220102 Drive and production of two-axis scanning micro mirror device with thin film metallic glass Cu-Zr-Ti
J2220102 薄膜金属ガラスCu-Zr-Tiを用いた二軸駆動マイクロミラーデバイスの製作と駆動([J222-01]マイクロ・ナノ材料創成とそのデバイス応用(1))
2014
The Proceedings of Mechanical Engineering Congress Japan
J2220102 薄膜金属ガラスCu-Zr-Tiを用いた二軸駆動マイクロミラーデバイスの製作と駆動([J222-01]マイクロ・ナノ材料創成とそのデバイス応用(1))
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