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Extreme ultraviolet polarizing optics using bare and aluminum-coated silicon carbide
an, "Extreme ultraviolet polarizing optics using bare and aluminum-coated silicon carbide," Appl. A deformable three-reflection system that uses a bare silicon carbide substrate can function as an in-line, high-throughput 1.30%2, 90°phase shifter in the 50-100 nm spectral range. For a given extreme ultraviolet wavelength, an aluminum thin film can be deposited on the silicon carbide substrate to suppress the parallel 1 p2 or perpendicular 1s2 polarization on single reflection or to introducedoi:10.1364/ao.34.006438 pmid:21060491 fatcat:w525jiskengtbplza3q4j6bppu