Strain and Texture in Al-Interconnect Wires Weasured by X-Xay Microbeam Diffraction

Nobumichi Tamura, J.-S. Chung, G. E. Ice, B. C. Larson, J. D. Budai, J. Z. Tischler, M. Yoon
1999 Materials Research Society Symposium Proceedings  
The local strain and texture in Al interconnect wires have been investigated using white and monochromatic x-ray microbeams on the MHATTCAT undulator beam line at the Advanced Photon Source. Intergrain and intragrain orientations were obtained with -0.01" sensitivity using white beam measurements on wide Al pads (-100 pm) and thin (2 pm) Al wires. Orientation changes of up to 1" were found within individual grains of the (111) textured Al interconnects. Deviatoric strain measurements indicate
more » ... urements indicate small intragranular strain variations, but intergranular strain variations were found to be quite large.
doi:10.1557/proc-563-175 fatcat:kulelksepnambbg2enppl5l3mq