High speed CT technique for total inspection in production line
生産現場における全数自動検査のための高速CT検査技術

杉田 信治, 益田 真之, 村上 清, 加藤 訓之
2011 MES  
Inline high-speed CT inspection machine for bottom joint inspection (ex:BGA,CSP) has been developed. Because traditional CT inspection machine took a lot of time to generate 3D image, inline X-ray inspection machine was limited to 2D or single-slice method (such as Tomosynthesis and Laminography). Using the OMRON developed parallel CT imaging method and parallel processing, we achieved high-speed inspection (less than 5sec per FOV).
doi:10.11486/mes.21.0_81 fatcat:dx4rgeilx5eu7l74f34nx7fhxi