Nitrogen Incorporation of Nanostructured Amorphous Carbon Thin Films by Aerosol-Assisted Chemical Vapor Deposition

A.N. Fadzilah, K. Dayana, M. Rusop
2013 Transactions on Electrical and Electronic Materials  
doi:10.4313/teem.2013.14.4.165 fatcat:elfp6nrpnrfhbazcjlilksnx2i