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Transactions of the Japan Society of Mechanical Engineers Series A
Niobium sulfide films have been prepared on stainless steel substrate by radio frequency sputter deposition. The effects of sputtering conditions such as argon pressure and positive bias voltage to the substrate on the film characteristics were studied. The morphology and the content of elements of the films were investigated by Film-XRD and EPMA and the internal stress was derived from curvature of substrate with film. The main results obtained are summarized as follows: The sputtered filmsdoi:10.1299/kikaia.79.779 fatcat:qdwhiaaauvhcfpvqtw6k6r6moq