Fabrication of in situ ultrathin anodic aluminum oxide layers for nanostructuring on silicon substrate

Bo Yan, Hoa T. M. Pham, Yue Ma, Yan Zhuang, Pasqualina M. Sarro
2007 Applied Physics Letters  
APPLIED PHYSICS LETTERS 91, 053117 ͑2007͒
doi:10.1063/1.2767768 fatcat:e2fbhpdcufakrbmccocqo75fci