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The influence of the relative phase between the driving voltages on electron heating in asymmetric dual frequency capacitive discharges
Plasma Sources Science & Technology
The influence of the relative phase between the driving voltages on electron heating in asymmetric phase-locked dual frequency capacitively coupled radio frequency plasmas operated at 2 and 14 MHz is investigated. The basis of the analysis is a nonlinear global model with the option to implement a relative phase between the two driving voltages. In recent publications it has been reported that nonlinear electron resonance heating can drastically enhance the power dissipation to electrons atdoi:10.1088/0963-0252/19/4/045001 fatcat:bc353ctp5bczpmjklix6u4jeam