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Polymers have the ability to conform to surface contours down to a few nanometres. We studied the filling of transparent epoxy-type EPON SU-8 into nanoscale apertures made in a thin metal film as a new method for polymer/metal near-field optical structures. Mould replica processes combining silicon micromachining with the photo-curable SU-8 offer great potential for low-cost nanostructure fabrication. In addition to offering a route for mass production, the transparent pyramidal probes aredoi:10.1046/j.1365-2818.2003.01134.x fatcat:4epn4dkc5vf5hgdxfzttomtcl4