BUCKLED BEAM LINEAR OUTPUT CAPACITIVE STRAIN SENSOR

J. Guo, H.-I. Kuo, D.J. Young, W.H. Ko
2004 2004 Solid-State, Actuators, and Microsystems Workshop Technical Digest   unpublished
A capacitive strain sensor employing a mechanical amplification scheme has been designed, analyzed, fabricated, and tested. The mechanical amplifier based on the bending of a buckled beam provides an increased device sensitivity, thus attractive on reducing the sensitivity requirement and power dissipation in the interface circuits. An analytical model was developed to predict the mechanical gain of the structure, which was confirmed by Finite-Element-Analysis (FEA), with an error of less than
more » ... error of less than 1.5% of the measurement results. The fabricated device achieved a sensitivity of 282 atto-farads/microstrain (aF/µ ). The mechanical thermal noise analysis shows that a sensitivity of 0.1 microstrains (µ ) with a dynamic range of 10,000 (80dB) over 10 kHz bandwidth can be achieved combining this design with a matching interface circuit.
doi:10.31438/trf.hh2004.89 fatcat:2deufbpbqzgkzcnr76v5oklqte