The large high-power solid lasers, such as the National Ignition Facility (NIF) of America and the Shenguang-III (SG-III) laser facility of China, can output over 2.1 MJ laser pulse for the inertial confinement fusion (ICF) experiments. Because of the enhancement of operating flux and the expansion of laser driver scale, the problem of contamination seriously influences their construction period and operation life. During irradiation by intense laser beams, the contaminants on the metallic

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... ce of beam tubes can be transmitted to the optical surfaces and lead to damage of optical components. For the high-power solid-state laser facilities, contamination control focuses on the slab amplifiers, spatial filters, and final-optical assemblies. In this paper, an effective solution to control contaminations including the whole process of the laser driver is put forward to provide the safe operation of laser facilities, and the detailed technical methods of contamination control such as washing, cleanliness metrology, and cleanliness protecting are also introduced to reduce the probability of laser-induced damage of optics. The experimental results show that the cleanliness level of SG-III laser facility is much better to ensure that the laser facility can safely operate at high energy flux.