A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2013; you can also visit the original URL.
The file type is application/pdf.
Stress-based vapor sensing using resonant microbridges
2010
Applied Physics Letters
Preserved Fulltext
We demonstrate that silicon-polymer composite microbridges provide a robust means of water vapor detection at ambient pressure. Volumetric changes in the reactive polymer alter the tension in a doubly clamped structure leading to large and rapid changes in the resonance frequency. We demonstrate stress-based sensing of water vapor in ambient pressure nitrogen using doubly clamped buckled beams coated with a hygroscopic polymer. We show stress sensitivity of around 20 kPa ͑ϳ170 ppb of water
doi:10.1063/1.3393999
fatcat:u5de7p65jfdejc7jxxeenly534