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Fabrication and Analysis of Tapered Tip Silicon Microneedles for MEMS based Drug Delivery System
2010
Sensors & Transducers
In this paper, a novel design of transdermal drug delivery (TDD) system is presented. The proposed system consists of controlled electronic circuit and microelectromechanical system (MEMS) based devices like microneedles, micropump, flow sensor, and blood pressure sensor. The aim of this project is to develop a system that can eliminate the limitations associated with oral therapy. In this phase tapered tip silicon microneedles have been fabricated using inductively coupled plasma (ICP) etching
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