化学気相析出法による炭化けい素の合成
Preparation of Silicon Carbide by Chemical Vapor Deposition

Toshio HIRAI, Takashi GOTO, Toshihiko KAJI
1983 Journal of the Ceramic Association Japan  
doi:10.2109/jcersj1950.91.1059_502 fatcat:t3xhtath7zdi7kgfwqcnxlzniy