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Carbon contamination and oxidation of Au surfaces under extreme ultraviolet radiation: An x-ray photoelectron spectroscopy study
2012
Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics
Extreme ultraviolet (EUV) radiation-induced carbon contamination and oxidation of Au surfaces were investigated using x-ray photoelectron spectroscopy (XPS). The Au sample was irradiated by EUV radiation at 13.5 nm for 9 h, while a series of XPS spectra were recorded for monitoring chemical modification during EUV exposure. XPS analysis showed that total carbon contamination (C 1s peak) at the surface was increased by $14% after 9 h of EUV exposure, while the C-H component played a dominant
doi:10.1116/1.4737160
fatcat:lfw3ss24jbdlnppi65ypphlhu4