A digital charge amplifier for hysteresis elimination in piezoelectric actuators

M Bazghaleh, S Grainger, M Mohammadzaheri, B Cazzolato, T-F Lu
2013 Smart materials and structures (Print)  
Nanopositioners are the key components in a variety of nanopositioning applications, such as scanning probe microscopes and atomic force microscopes. Piezoelectric actuators are the most common actuators among a variety of smart actuators due to their higher resolution, lower power consumption and wider operating frequency but they suffer hysteresis which affects linearity. In this paper, an innovative digital charge amplifier is presented to reduce hysteresis in stack piezoelectric actuators.
more » ... lectric actuators. Experimental results are presented.
doi:10.1088/0964-1726/22/7/075016 fatcat:hgzjz3n4unglneruz76hm7n774