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In the field of BioMEMS, pneumatic actuation has been a common feature in the production of "Lab-On-A-Chip" (LOC) devices due to their cheap production costs and well-established fabrication protocols, however, are limited by a lack of precise control and component sizes. Electrostatic actuators in turn offer a low power consumption and highly controllable alternative for LOC devices, however, the protocol to create these components is not as well established. Computational modeling can act asdoi:10.7282/t3-3v7h-qn27 fatcat:bhcdojlyzfbdpbvp3vgtchstju