Quasi-static microscanner with linearized scanning for an adaptive 3D-laser camera

Thilo Sandner, Thomas Grasshoff, Markus Schwarzenberg, Harald Schenk
2013 2013 International Conference on Optical MEMS and Nanophotonics (OMN)  
This paper presents a gimbaled MEMS scanning mirror (MSM) especially developed for adaptive raster scanning in a novel 3D ToF laser camera. Large quasi-static deflections of ±10° are provided by vertical comb drives in vertical direction in contrast to resonant horizontal scanning of the 2.6x3.6mm elliptical mirror at 1600Hz and 80° optical scan range. For position feedback piezo-resistive position sensors are integrated on chip for both axes. To guarantee the full reception aperture of
more » ... e 5mm a synchronized driven MEMS scanner array -consisting of five hybrid assembled MEMS devices -are used in a novel 3D ToF laser scanner enabling a distance measuring rate of 1MVoxel/s and an uncertainty of ToF distance measurement of 3...5mm at 7.5m measuring range for a gray target.
doi:10.1109/omn.2013.6659080 fatcat:kk3cty5f5randhzw5tzse3utja