Very bright and coherent x-ray sources combined with efficient and high resolution x-ray optics enable imaging and spectroscopy of samples (e.g. biological specimens, functional materials and nanodevices) with unprecedented accuracy. Theoretical simulations have shown that sub-nanometer resolution is possible for perfect multilayer Laue lenses [1] and recent experimental results demonstrated sub-10 nm resolution with high focusing efficiency [2]. However, making perfect lenses is very

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... g since layer thickness errors of even a fraction of an ångstrom already significantly broaden the focus. To achieve diffraction limited focusing it is therefore of utmost importance to characterize lens aberrations and correct them.