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Thin Film Al-Al2O3-Al Capacitors With Dielectric Layer Formed at 400℃
1980
ElectroComponent Science and Technology
A comparative study is made of Al2O3layers formed at 400℃ in molten KNO3and Al2O3formed at room temperature in a common solution of ammonium pentaborate in ethylene glycol. At 400℃ and constant current (0.5 mA/cm2) the linear anodization range is limited to 2.7 V by scintillation and local oxide breakdowns. Nonporous 200 Å thick (0.4μF/cm2) oxide layers were produced at 2.0 V (400℃) and 8 V (20℃). Electron diffraction indicated aγ-Al2O3structure at an anodization temperature of 400℃ and
doi:10.1155/apec.6.219
fatcat:jat6poecpje33hjin5wrbek3gy