Glass surface modification using Nd:YAG laser in SF6 atmospheres
Journal of Theoretical and Applied Physics
Glass surface modification is one of the processes which changes its physical properties. Changing optical property is a significant effect of surface modification. Among the surface modification methods, laser surface modification is attractive for researchers. Here, SiO 2 glass target was irradiated by Q-switched Nd:YAG laser (1064 nm) in SF 6 atmospheres as well as vacuum. In this process, an Nd:YAG laser beam was focused near the glass target while the target was inserted in a chamber
... in a chamber containing SF 6 atmosphere or at vacuum condition. The surface morphology changes were investigated by scanning electron microscopy (SEM). Noticeable surface changes were observed due to laser irradiation in SF 6 atmosphere. Although the absorption lines of SF 6 molecule are not near the Nd:YAG laser wavelength, laser-induced breakdown spectroscopy (LIBS) showed decomposition of SF 6 molecules near a glass target. The ablated fragments from the target impacted on gas molecules and decomposed them. In this work, LIBS showed that there were several fluorine ions when the target was irradiated in an SF 6 atmosphere. This demonstrates SF 6 molecule decomposition near the glass target by laser irradiation. The plasma temperature was *2000 K. This temperature is much less than metallic or other gaseous materials' plasma temperatures.