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Improved model of rectangular scratch drive actuator
2011
Journal of Micro/Nanolithography
This paper proposes an integrated model of a scratch drive actuator (SDA) based on a fourth-order governing equation of the Euler-Bernoulli theory. By solving this equation with proper boundary conditions, typical SDA output characteristics, such as noncontact length, priming voltage, deflection curve, output force, and bending stress, can be determined. The results of the output force in a static model are then used as the input of single degree-of-freedom dynamic SDA model to investigate the
doi:10.1117/1.3549920
fatcat:7c4sqjbs2rgbhklx7wh5gft3ra