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The on-state reliability of metal-insultor-metal antifuses based on aluminum nitride, silicon nitride, amorphous silicon, and tetrahedral amorphous carbon were investigated and compared. Among them, only the tetrahedral amorphous carbon antifuses show no spontaneous switching from the on-state to the off-state during operation. The unwanted switching was found to be associated with the presence of pinholes in the upper metal electrode of the antifuse. The percentages of silicon nitride anddoi:10.1109/55.843155 fatcat:q2tdceytu5hh5mzksv7ufcydn4