In this paper, the pneumatic driven manipulation system is driven by the pneumatic cylinders. The proposed system is built by the designed pneumatic force control system and the microscope, which is integrated with the control interface. Firstly, the characteristics of the pneumatic force control system are measured as the proportional pressure control valve. In accordance with these nonlinear characteristics, a self tuning fuzzy controller with a dead zone compensator is designed to improve

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... cision of the pneumatic force control system. From experimental results, the force error can be controlled within ±1 mN. Next, the real-time image is captured by the microscope with a 1/2 type CCD camera. Through designed image processing, image tracking and image recognition, visual image is used to define the position a probe tip. The distance between the target position and a probe tip can be calculated. Finally, the force control of the pneumatic force control system, calculating the distance between the target position and a probe tip, the control processes are integrated with designed the control interface. Visual C++ code from MFC is used to finish the control interface. From experimental results, the position error can be controlled within ± 1 pixel.