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Ge nanocrystals in alumina matrix: A structural study
2010
Journal of Physics, Conference Series
Germanium (Ge) nanocrystals (NCs) embedded in alumina thin films were produced by deposition on silicon (111) substrates using radio-frequency (RF) magnetron sputtering. By changing growth condition and annealing parameters samples with large and small Ge-NCs were produced. The average size of NCs in the sample with larger NCs was estimated to be 7.2, 30.0 and 7.6 nm, and 5.0, 7.0 and 4.8 nm for the sample with smaller NCs, according to Xray diffraction (XRD), Raman and high resolution
doi:10.1088/1742-6596/209/1/012060
fatcat:vwbjuca62fh2zfjozyuejpoqku