A study of stacking limit and scaling in 3D ICs: an interconnect perspective

Michael B. Healy, Sung Kyu Lim
2009 2009 59th Electronic Components and Technology Conference  
An examination of large-scale stacking of 3D integrated ICs from a power-supply and thermal reliability perspective is presented. Noise characteristics and scaling issues related to through-silicon-via (TSV) size and pitch as well as other power-supply topology characteristics are included. Thermal simulations are carried out assuming the use of micro-fluidic heatsinks to provide cooling to systems with power dissipation of up to 525 watts and 46 integrated silicon tiers. Results indicate that
more » ... hese large systems are feasible given sufficient planning. Power-delivery-bump pitch is identified as the most important factor influencing IR-drop and dynamic noise. Contact resistance also may become a major limiting factor. 978-1-4244-4476-2/09/$25.00
doi:10.1109/ectc.2009.5074166 fatcat:f2tbhbfqxzb5tj2lxv3r5frjqy