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A study of stacking limit and scaling in 3D ICs: an interconnect perspective
2009
2009 59th Electronic Components and Technology Conference
An examination of large-scale stacking of 3D integrated ICs from a power-supply and thermal reliability perspective is presented. Noise characteristics and scaling issues related to through-silicon-via (TSV) size and pitch as well as other power-supply topology characteristics are included. Thermal simulations are carried out assuming the use of micro-fluidic heatsinks to provide cooling to systems with power dissipation of up to 525 watts and 46 integrated silicon tiers. Results indicate that
doi:10.1109/ectc.2009.5074166
fatcat:f2tbhbfqxzb5tj2lxv3r5frjqy