Preparation of Ultrafine SiC Powders by the Plasma CVD under Reduced Pressure
プラズマCVD法によるSiC超微粉末の低圧合成

Kazunori KIJIMA, Mikio KONISHI
1985 Journal of the Ceramic Association Japan  
doi:10.2109/jcersj1950.93.1081_511 fatcat:qn2rv5aitzafhdlcsvt5bsqjhq