A copy of this work was available on the public web and has been preserved in the Wayback Machine. The capture dates from 2018; you can also visit the original URL.
The file type is
To extend capabilities of the classic scanning electron microscopes toward the variable pressure/environmental technique, the authors designed the vacuum and detection system in the form of a simple attachment which does not need any changes in an original structure of the instrument. The main part of the system is the vacuum and detection head, combining the intermediate vacuum chamber and electron detectors of chosen kinds. The low vacuum secondary electron detector extracts electrons throughdoi:10.12693/aphyspola.120.23 fatcat:ef2yrbfnyjbctmqanqpblinfai